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ULVAC VD Series Vacuum Pump

VD series is a Double stage rotary vane type direct-driven oil rotary vacuum pump equipped with ULVAC's original multi-voltage motor.
This dual stage rotary vane mechanical vacuum achieves lower ultimate pressure.
Design optimization and wide option realized quiet operation and so this pump is suitable for a wide range of applications.
  • VD Series

  • ULVAC

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VD series is a Double stage rotary vane type direct-driven oil rotary vacuum pump equipped
withULVAC's original multi-voltage motor.
This dual stage rotary vane mechanical vacuum achieves lower ultimate pressure.
Design optimization and wide option realized quiet operation and so this pump is
suitable for a wide range of applications.

Features

  • Multiple voltage motor fully developed by ULVAC
    A single motor can cover a wide range voltage, 200 to 240V / 380 to 460V.

  • Forced oil circulation system
    Pumping speed is stable even around atmospheric pressure. It is suitable for repeat and continuous running between atmospheric pressure and vacuum.

  • Various options are available for special application
    In addition to the standard model, we also offer models for special applications.

Applications

  • Evaporation, sputtering, and ion plating

  • Analytical instrument and leak test system

  • Gas exchange, liquid filling

  • Vacuum dry, freeze dry, vacuum deaeration, and vacuum insulation

  • Vacuum chuck and vacuum molding

  • Other vacuum equipments

Specifications

ModelVD30CVD40CVD60CVD90C
Designed pumping
speed
50Hz30 m3/h/
(500 L/min)
40 m3/h/
(670 L/min)
60 m3/h/
(1000 L/min)
90 m3/h/
(1500 L/min)
60Hz36 m3/h/
(600 L/min)
48 m3/h/
(800 L/min)
72 m3/h/
(1200 L/min)
108 m3/h/
(1800 L/min)
Ultimate pressure *1GP Close≦ 0.67 Pa
GP Open≦ 6.7 Pa
Maximum water
vapor
tolerance
GP Open50Hz1300 Pa1360 Pa1320 Pa970 Pa
60Hz1400 Pa1760 Pa2800 Pa2820Pa *2
Maximum water
vapor
capacity
GP Open50Hz190 g/h270 g/h430 g/h480 g/h
60Hz250 g/h410 g/h1100 g/h1650 g/h *2
Motor *3Type of motorTotally enclosed fan cooled 3 phase induction motor
Energy efficiency
class
IE3
Power1.5 kW(4 poles)1.5 kW(4 poles)2.2 kW(4 poles)3.7 kW(4 poles)
Voltage50Hz200 ~ 240 /380 ~ 415 V
60Hz200 ~ 240 /380 ~ 460 V
OilULVOIL R-72
Oil capacity1.0 ~ 2.5 L2.5 ~ 4.0 L
Cooling methodAir cooled
Inlet port connection JIS B 2290
( ISO KF )
VG40 equivalency / KF40 ( optional )VG50 equivalency / KF50 ( optional )
Outlet port connection JIS B 2290
( ISO KF )
VG40 equivalency / KF40 ( optional )
External dimension WxDxH210×660×
324mm
210×680×
324mm
280×761×
371mm
280×831×
371mm
Weight58kg60kg90kg113kg
Applicable standardCE
Standard accessoryA dose of oil
Recommended oil mist trap
( Optional ) *4
TM201: for low load operationTM401: for low load operation
TM401: for high load operationTM-2: for high load operation
OptionOil mist trap, other oil types, gas ballast valve, ISO flange, explosion-resistant motor, special type for special application ( spec A, B and H )

Note) This specification uses SI measurement units. Conversion to non-SI units is as follows :
   6.7 Pa = 5 × 10-2 Torr
*1 Measured with a Pirani gauge.
  ( Apprx. 6.7 x 10-2 Pa when measured with a McLeod vacuum gauge. )
*2 VD90C is not allowed the continuous operation in the inlet pressure at 1,000 Pa or
   more and the maximum water vapor tolerance / maximum water vapor capacity
  (in the continuous operation)is 1,000 (Pa) / 600 (g/h).
*3 Factory shipment setup is 200V class Δ delta connection.
   Please change it to Y connection if working voltage is 400V class.
*4 High load operation means repeat pumping down between atmospheric pressure and
   vacuum in short term or long time operation at 10,000 Pa (75 Torr ) or higher.

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